Technology
Korvus
Korvus delivers the HEX Series: highly modular Physical Vapour Deposition (PVD) systems, engineered for agile thin film research and scalable R&D applications.
Korvus Technology specializes in the HEX Series, a line of highly modular PVD systems for thin film deposition. The core technology centers on a six-sided aluminum high-vacuum chamber, allowing rapid, tool-free reconfigurations via detachable side panels. This modularity supports a diverse range of deposition instruments, including Mini E-Beam Evaporators (single and four-pocket) and RF/DC Sputtering Sources, enabling multi-layer, multi-process deposition without breaking vacuum. Systems range from the benchtop HEX to the larger HEX-XL (up to 300mm samples), achieving a base pressure of <5x10⁻⁷ mbar (factory tested). We provide the flexibility researchers need for applications in material science, semiconductors, and photovoltaics globally.
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